Wafer Manufacturing - Shaping of Single CrystalSilicon Wafers
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- Wiley
More About This Title Wafer Manufacturing - Shaping of Single CrystalSilicon Wafers
English
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
