Principles of Plasma Discharges for Materials Processing
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More About This Title Principles of Plasma Discharges for Materials Processing

English

MICHAEL A. LIEBERMAN, PhD, is Professor of Electrical Engineering at the University of California, Berkeley, and Director of the Berkeley Electronics Research Laboratory. He has published more than 140 journal articles on the topics of plasmas, plasma processing, and nonlinear dynamics. He has also published, with Professor Lichtenberg, Regular and Stochastic Motion and Regular and Chaotic Dynamics, Second Edition. ALLAN J. LICHTENBERG, PhD, is Professor of Electrical Engineering at the University of California, Berkeley. A respected pioneer in the fields of high-temperature plasmas, plasma discharges, and nonlinear dynamics, Dr. Lichtenberg has written over 100 articles in these areas. In addition to the books coauthored with Professor Lieberman, he has written an earlier monograph Phase Space Dynamics of Particles.

English

Basic Plasma Equations and Equilibrium.

Atomic Collisions.

Plasma Dynamics.

Diffusion and Transport.

DC Sheaths.

Chemical Reactions and Equilibrium.

Molecular Collisions.

Chemical Kinetics and Surface Processes.

Particle and Energy Balance in Discharges.

Capacitive Discharges.

Inductive Discharges.

Wave-Heated Discharges.

DC Discharges.

Etching.

Deposition and Implantation.

Appendices.

References.

Index.

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