Cleanroom Technology - Fundamentals of Design,Testing and Operation
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English

Preface.

Acknowledgments.

Introduction.

The History of Cleanrooms.

Cleanroom Classification Standards.


Information Sources.

The Design of Turbently Ventilated and Ancillary Cleanrooms.

Design of Unidirectional Cleanrooms and Clean Air Devices.

Construction Materials and Surface Finishes.

High Efficiency Air Filtration.

Cleanroom Testing and Monitoring.

Measurement of Air Quantities and Pressure Differences.

Air Movement Control Between and Within Cleanrooms.

Filter Installation Leak Testing.

Airborne Particle Counts.

Microbial Counts.

Operating a Cleanroom: Contamination Control.

Cleanroom Disciplines.

Entry and Exit of Personnel.

Materials, Equipment and Machinery.

Cleanroom Clothing.

Cleanroom Masks and Gloves.

Cleaning a Cleanroom.

Index.

English

"...extremely useful and helpful...very well-written, highly organized, easy to understand and follow..." (Environmental Geology, 2003)
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