In Situ Real-Time Characterization of Thin Films
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More About This Title In Situ Real-Time Characterization of Thin Films

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ORLANDO AUCIELLO, PhD, is a Senior Scientist at the Argonne National Laboratory. ALAN R. KRAUSS, PhD, (deceased) was a Senior Scientist at the Argonne National Laboratory.

English

Ion Beam Deposition and Surface Characterization of Thin Multicomponent Oxide Films During Growth (A. Krauss, et al.).

Reflection High-Energy Electron Diffraction as a Tool for Real-Time Characterization of Growth of Complex Oxides (I. Bozovic, et al.).

In Situ Real-Time Characterization of Surfaces and Film Growth Processes via Ellipsometry (E. Irene).

Evaluation of Initial Stages of Heteroepitaxial Growth by Reflectance Spectroscopy and Transmission Electron Microscopy (K. Bachmann & S. Mahajan).

Laser Reflection Interferometry for In Situ Real-Time Characterization of Film Growth Rate, Surface Roughness, and Optical Absorption. (T. McCauley, et al.).

X-Ray Reflectivity for Studies of Surface and Interface Structure (E. Chason).

Curvature-Based Techniques for Real-Time Stress Measurements During Thin-Film Growth (J. Floro & E. Chason).

Photoelectron Emission Microscopy and Related Techniques for In Situ Real-Time Surface Studies (M. Kordesch).

Index.

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"Eight papers focus on a new generation of advanced electronic, optical, and other micro-/nano-devices involving the synthesis of materials in thin-film form." (SciTech Book News Vol. 25, No. 2 June 2001)
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